| 摘要 |
PROBLEM TO BE SOLVED: To surely and easily change the fall end position (adjust an insertion depth) of all gas blowing nozzles in an intermittent rotary gas substitute device. SOLUTION: The cam roller 24 of a gas blowing nozzle 13 mounted on the periphery of a rotary table 12 is moved following a rise end position setting cam 38 and a fall end position setting cam 35 placed over a predetermined area on the circumference. At a stop position where a gas blow is started, a first elevator member 44, and at a stop position where the gas blow is stopped, a second elevator member 46 are placed. By the first elevator member 44, the roller 24 at the rise end is lowered onto the cam 35, and by the second elevator member 46, the roller 24 at the fall end is raised to the height of the cam 38. The height of the cam 35 is adjustable, and with the change of its height, the elevating distance between the elevator member 44 and the elevator member 46 is adjusted simultaneously. COPYRIGHT: (C)2003,JPO
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