| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical component holding unit which is usable even under a vacuum and can uniformly hold an optical component. SOLUTION: A projection part 3 of a mirror 1 is held by the holding unit 10. The holding unit 10 has a holding recessed part 11 which has a sectionally recessed shape where the projection part 3 of the mirror 1 enters and a ring plane shape. On the internal surface of the holding recessed part 11 which is close to an opening end, an exhaustion groove 13 is formed. Upper and lower air pads 15 and a lateral air pad 16 are provided on the inner side beyond the exhaust groove 13. Deformation of a component mount part 19 of a body 3 can be absorbed by holding an air lift pad (exhaust groove 13 and air pads 15 and 16) without contacting. Further, local deformation and asymmetric deformation of the mirror 1 and the occurrence of stress birefringence can be prevented and the precision of the mirror 1 can be secured. COPYRIGHT: (C)2003,JPO |
