| 发明名称 |
Method and system for optical proximity correction |
| 摘要 |
A computer implemented method for OPC includes: storing an improper OPC pattern and a corrective treatment for the improper OPC pattern in a library storage medium; reading a layout pattern; and matching the layout pattern with the improper OPC pattern stored in the library storage medium. |
| 申请公布号 |
US2003115569(A1) |
申请公布日期 |
2003.06.19 |
| 申请号 |
US20020304895 |
申请日期 |
2002.11.26 |
| 申请人 |
IKEUCHI ATSUHIKO |
发明人 |
IKEUCHI ATSUHIKO |
| 分类号 |
G03F1/08;G03F1/14;G03F1/36;G03F1/68;G03F1/70;G06F17/50;H01L21/027;H01L21/82;(IPC1-7):G06F17/50 |
主分类号 |
G03F1/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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