GROWING CHAMBER OF SILICON INGOT HAVING SMALL DIAMETER

摘要

PURPOSE: A growing chamber of silicon ingot having a small diameter is provided to be capable of quickly cooling a high temperature silicon ingot to room temperature by using a cooling part. CONSTITUTION: A quartz crucible(114) storing silicon melt is located in a chamber main frame(110). The quartz crucible is surrounded with heater(118) and a heat shielding part(120). A pull-up driving part(122) is installed on the upper portion of the quartz crucible for growing a seed crystal connected with a wire(124) to silicon ingot with a small diameter by rotating and pulling up the seed crystal using the wire. A cooling part(130) is installed on the pull-up path of the silicon ingot for cooling the silicon ingot while growing the silicon ingot. Preferably, a water cooling tube is used as the cooling part. Preferably, a purge gas jetting ring(140) is installed at the outer peripheral portion of the cooling part.