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摘要
申请公布号
JP3417382(B2)
申请公布日期
2003.06.16
申请号
JP20000159677
申请日期
2000.05.30
申请人
发明人
分类号
G01R31/26;G01R31/02;G01R31/28;H01L23/12;H01L23/28;H01L23/34;(IPC1-7):G01R31/26
主分类号
G01R31/26
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