STRUCTURE AND METHOD FOR PREVENTING TUBE FROM BEING CHARGED WITH STATIC ELECTRICITY

摘要

PROBLEM TO BE SOLVED: To prevent a nonconductive tube from being punctured by providing a structure that guides and discharges the static electricity generated between the tube and a fluid flowing through the tube to the outside. SOLUTION: A conductive wire 132 is provided in the nonconductive tube 131. One end of the wire 132 is soldered to an insert A133 which is attached to one end of the tube 131 for attaching the tube 131 to the wall surface of a chamber 10. The length of the wire 132 is adjusted so that the wire 132 may be separated from the insert A and another insert B134 attached to the other end of the tube 131 for attaching the tube 131 to a chuck 11 by about several millimeters. COPYRIGHT: (C)2003,JPO