| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface wave device having small variation in sound velocity with respect to a film thickness, in which an attenuation constant is nearly equal to zero in the step when an electrode is formed on a piezoelectric substrate. SOLUTION: An IDT is composed of an electrode material having a larger mass density than 7 g/cm<SP>3</SP>, including at least one of main components, i.e., Au, W, Ta, Ag, Mo, Cu, Ni, Cr, and Zn, on a crystal substrate having an Euler angle (0°, 121°≤θ≤136°, 90°±5°), and an SH wave is excited. COPYRIGHT: (C)2003,JPO
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