发明名称 Resist stripper composition
摘要 The present invention relates to a resist stripper composition that is used to remove resists during semiconductor device manufacturing processes such as for large size integrated circuits, very large size integrated circuits, etc. The resist stripper composition comprises 3 to 10 wt % of an organic amine compound, 30 to 60 wt % of a solvent selected from a group consisting of DCMAc, DMF, DMI, NMP, etc., 30 to 60 wt % of water, 1 to 10 wt % of catechol, resorcin or a mixture thereof and 1 to 10 wt % of a C4-6 straight polyhydric alcohol.
申请公布号 US2003100459(A1) 申请公布日期 2003.05.29
申请号 US20020258823 申请日期 2002.10.25
申请人 YOON SUK-IL;PARK YOUNG-WOONG;OH CHANG-IL;LEE SANG-DAI;YOO CHONG-SOON 发明人 YOON SUK-IL;PARK YOUNG-WOONG;OH CHANG-IL;LEE SANG-DAI;YOO CHONG-SOON
分类号 G03F7/42;H01L21/027;(IPC1-7):C11D1/00 主分类号 G03F7/42
代理机构 代理人
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