| 摘要 |
<p>The present invention relates to an apparatus for manufacturing an organic electro-luminescent device, and more particularly, to an apparatus for manufacturing an organic electro-luminescent device including a thin film with at least one player. The apparatus for manufacturing the organic electro-luminescent device according to the present invention comprises a substrate carrying chamber 100 in which a plurality of openings 110 for installation of processing chambers are formed and a pump port 120 is installed, a substrate carrying means 200 installed in the substrate carrying chamber 100 for carrying substrates processed in the plurality of openings to next openings within the substrate carrying chamber 100, and a plurality of chambers 300 attached to the openings 100 of the substrate carrying chamber 100, respectively. Accordingly, the substrates can be carried within the substrate carrying chamber and relevant processes such as substrate cleaning, mask alignment and cleaning, and vapor deposition can be simultaneously performed within the plurality of chambers.</p> |
