发明名称 A thin-film solar cell
摘要 The present invention relates to thin-film solar cells of the CIGS-type. A characteristic feature of the invention is the use of two integrally formed buffer layers, a first ALD Zn(O,S) buffer layer ( 7 ) on top of the CIGS-layer ( 3 ) and a second ALD ZnO-buffer layer ( 8 ) on top of the first ( 7 ) buffer layer. Both buffer layers are deposited in the same process step using ALD (atom layer deposition). The invention also relates to a method of producing the cell and a process line for manufacturing of the cell structure.
申请公布号 SE0301350(D0) 申请公布日期 2003.05.08
申请号 SE20030001350 申请日期 2003.05.08
申请人 FORSKARPATENT I UPPSALA AB 发明人 CHARLOTTE PLATZER BJOERKMAN;JOHN KESSLER;LARS STOLT
分类号 H01L;H01L21/363;H01L31/032;H01L31/0336;H01L31/042;H01L31/0749;(IPC1-7):H01L/ 主分类号 H01L
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