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发明名称
PLASMA COLUMN
摘要
申请公布号
KR20030030986(A)
申请公布日期
2003.04.18
申请号
KR20027010191
申请日期
2002.08.08
申请人
发明人
分类号
H01J17/04;H01J61/70
主分类号
H01J17/04
代理机构
代理人
主权项
地址
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