摘要 |
The invention relates to a lighting system comprising a coherence reducer (1) which is provided with a mirror (2). Said coherence reducer introduces different phase shifts into a supplied coherent beam cluster (10) by means of the mirror (2), according to the position in the beam cross-section, and produces an illumination beam cluster (11). The inventive system also comprises an illuminating optical arrangement which is arranged downstream from the coherence reducer (1) and is used to illuminate an object field. Said optical arrangement comprises a micro-optical arrangement (4; 19) having a plurality of optical elements (9; 20) which are arranged in the form of a raster, and an imaging optical arrangement (5) which is arranged downstream from the micro-optical arrangement (4; 19). According to the invention, the mirror comprises an element (2) having a surface which is divided into a plurality of parallel partial surfaces (8) which are staggered in the perpendicular direction in relation to their surface. The supplied beam cluster (10) is reflected off the partial surfaces (8) of the mirror in such a way that partial illumination beam clusters (11) project from the partial surfaces (8) of the mirror, together forming the illumination beam cluster having the different phase shifts. |
申请人 |
CARL ZEISS MICROELECTRONIC SYSTEMS GMBH;ERDMANN, LARS;STEINER, REINHARD;BRUNNER, ROBERT;BURKHARDT, MATTHIAS;BISCHOFF, JOERG |
发明人 |
ERDMANN, LARS;STEINER, REINHARD;BRUNNER, ROBERT;BURKHARDT, MATTHIAS;BISCHOFF, JOERG |