Earthquake protection for semiconductor processing equipment

摘要

A wafer processing apparatus is provided with a wafer carrier comprising a doorplate, a pedestal including one or more legs to support the pedestal on the doorplate, and a wafer rack positionable on the pedestal. A pedestal lock is connected to the doorplate and is selectively engageable with at least one of the legs to lock the pedestal to the doorplate. A lock is further provided to selectively engage at least one of the wafer rack and the pedestal to lock the wafer rack to the pedestal. The pedestal is thereby prevented from falling off of the doorplate, and the wafer rack is prevented from falling off of the pedestal, during earthquake-induced vibrations and accelerations.