发明名称 Lead frame
摘要 A section of predetermined geometry and area is provided on or in a die pad of a lead frame and taken as a mark to be used for checking the position of a semiconductor chip. If the semiconductor chip is placed outside an allowable range in the X direction, the semiconductor chip overlaps the mark, thereby changing the geometry of an observable portion (slanted portion) of the mark. By means of the change, a positional deviation of the semiconductor chip in the X direction can be ascertained. A positional deviation of the semiconductor chip in Y direction is determined, by observing whether or not an electrode is situated between extensions of sides of a certain portion of the section.
申请公布号 US2003062604(A1) 申请公布日期 2003.04.03
申请号 US20020256006 申请日期 2002.09.27
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 UEBAYASHI TETSUYA;ABE SHUNICHI;IZUMI NAOKI;YAMAZAKI AKIRA
分类号 H01L21/52;H01L23/495;H01L23/50;H01L23/544;(IPC1-7):H01L23/495 主分类号 H01L21/52
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