METHOD FOR PRODUCING POROUS SILICA FILM WITH SMOOTH SURFACE

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a porous silica film capable of giving a porous silica film applicable to an optical functional material and an electronic functional material, having uniform pores and excellent in smoothness of the film surface. SOLUTION: In the method for producing a porous silica film, a substrate is coated in a humid atmosphere with a coating liquid obtained by partially hydrolyzing and dehydration-condensing alkoxysilanes in the presence of a surfactant.