| 摘要 |
An axial direction excitation type F2 laser oscillator 11 comprising a discharge tube 1 consisting of an insulating cylinder and metal electrodes 2, 3 at both ends thereof, a reflecting mirror 5 or a transmitting mirror 6 constituting a resonator outside the electrodes 2, 3. A high voltage for pulse discharge is applied to the discharge electrodes 2, 3 from a drive circuit. The total gas pressure in the discharge tube 1 is set in a range between 10 Torr. and 100 Torr., the concentration of F2 gas to the total gas is set to be in a range between 0.2% and 2.0%. The low-pressure axial direction excitation type F2 laser oscillator having small size high efficiency can be provided at a low cost.
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