| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid droplet discharging head with high accuracy, high density and high reliability in which contact static electrification generated by driving is suppressed and inferiority of operation can be suppressed, and in addition, bonding with high reliability at low temperature is possible. SOLUTION: A laminating structure is provided in which the first base sheet 110 provided with an oscillation plate 111 and the second base sheet 120 provided with an electrode 121 are bonded. An insulating film 125 containing boron or both boron and phosphorus is formed on a face facing to the electrode 121 of the oscillating plate 111 and/or a face facing to the oscillating plate of the electrode. A plurality of projected parts 126 consisting of a part or the whole of elements constituting the insulating film 125 are formed on the surface of this insulating film 125. As the contact static electrification during driving is decreased by these projected parts 126, and the insulating film containing boron or both boron and phosphorus is used, size and the number (density) of the projected parts can be controlled only by adjusting heating condition of the insulating film and concentration of phosphorus and boron in the insulating film.
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