| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning laser microscope capable of taking a three- dimensional image of a sample at high speed, and measuring the height of the sample highly accurately. SOLUTION: This microscope has a laser beam source 1, a light deflector 5 for scanning a laser beam on a sample 8, an objective lens 7 for condensing light onto the sample 8, a detector 11 for detecting the intensity of light from the sample 8, image acquisition means 13, 14 for acquiring an image based on the output of the detector 11, an image display means (not shown in Fig.), a stage 12 capable of adjusting the relative position between the sample 8 and the objective lens 7, a threshold setting part 15 for dividing an output value detectable by the detector 11 into plural regions, a determination part 16 for determining whether the output detected by the detector 11 exceeds the threshold or not, and a moving quantity setting driving part 17 for setting the moving quantity of the moving mechanism 12 corresponding to the result acquired by the determination part 16 and driving the moving mechanism 12 as much as the set moving quantity.
|
