发明名称 Thin film transistor
摘要 A semiconductor transistor comprising a substrate having an active layer formed thereon, a source and a drain formed in the active layer, a gate insulating layer formed on the active layer and a gate electrode formed on the insulating layer, wherein the active layer has at least one recombination center which is located between the source and the drain and which extends from the substrate side through the active layer for less than the full depth thereof. The transistor can be fabricated by depositing the recombination centers on the substrate prior to depositing the active layer or by other methods such as diffusing material from the substrate side into the active layer.
申请公布号 US6528830(B1) 申请公布日期 2003.03.04
申请号 US20010914926 申请日期 2001.12.13
申请人 SEIKO EPSON CORPORATION 发明人 LUI BASIL;MIGLIORATO PIERO
分类号 H01L21/336;H01L29/786;(IPC1-7):H01L31/072 主分类号 H01L21/336
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