| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a hydrogen separation membrane, wherein or Pd a Pd alloy is formed to a porous support in a thin film form, satisfying requirements for a hydrogen transmission speed and hydrogen selectivity. SOLUTION: The porous support is arranged above an arranging surface of a Pd source substance or a Pd alloy source substance in a reactor so as to become parallel to the arranging surface. The Pd source substance or Pd alloy source substance and the porous support are heated by respectively independent heating means to form Pd or a Pd alloy on the porous support in a membrane form within the definite film forming range of the support. When palladium acetate is used as the Pd source substance, the heating temperature of the porous support is set to 200-300 deg.C to make it possible to obtain the hydrogen separation membrane excellent in hydrogen permselectivity.
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