发明名称 |
Method and system for controlling the concentration of a component in a composition with absorption spectroscopy |
摘要 |
<p>Provided are methods and systems for controlling the concentration of a component in a composition, and semiconductor processing methods and systems. One exemplary method of controlling the concentration of a component in a composition involves: providing a composition which has a liquid portion, wherein the liquid portion contains a component to be monitored; performing an absorption spectroscopy measurement on a sample of the composition; and controlling the concentration of the component in the composition based on the absorption spectroscopy measurement using a feedback control loop. The invention allows for controlling the concentration of a component in a composition, for example, a corrosion inhibitor in a chemical planarization (CMP) chemical, as well as in pre- and post-CMP storage/treatment chemicals, and can provide real time, accurate process control in a simple and robust manner. <IMAGE></p> |
申请公布号 |
EP1286239(A2) |
申请公布日期 |
2003.02.26 |
申请号 |
EP20020291724 |
申请日期 |
2002.07.09 |
申请人 |
L'AIR LIQUIDE, SOCIETE ANONYME A DIRECTOIRE ET CONSEIL DE SURVEILLANCE POUR L'ETUDE ET L'EXPLOITATION DES |
发明人 |
MISRA, ASHUTOSH;FISHER, MATTHEW L. |
分类号 |
G01N21/31;G01J3/42;G01N21/33;G05D11/13;(IPC1-7):G05D11/13;H01L21/00 |
主分类号 |
G01N21/31 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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