MIXING DEVICE AND MIXING METHOD FOR GAS FOR INSPECTION

摘要

PROBLEM TO BE SOLVED: To provide a mixing device and mixing method for gas for inspection which are capable of regulating the gas for inspection to a set concentration with good accuracy and are capable of maintaining this concentration at the set concentration or setting the concentration at the different set concentrations even in replenishing the gas for inspection. SOLUTION: A stop valve 12a of a gaseous helium delivery pipe 12 connected to a mixing tank 11, a stop valve 13a of a pneumatic delivery pipe 13, a pressure gage 14 connected to the mixing tank 11, a gaseous helium integrator 16a connected to the gaseous helium delivery pipe 12 and an air integrator 18a connected to the pneumatic delivery pipe 13 are connected to a sequencer 17. The amounts of the gaseous helium and air supplied from the gaseous helium delivery pipe 12 and the pneumatic delivery pipe 13 to the mixing tank 11 are controlled by the sequencer 17 according to the measurement of the pressure gage 4, the gaseous helium integrator 16a and the air integrator 18a.