| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method whereby a three-dimensional structural body including very small members can be easily manufactured. SOLUTION: The method of manufacturing the three-dimensional structural body includes forming a laminated structural body in which an active layer 116 and a silicon substrate 132 are joined to each other with a mask 128 therebetween; forming a mask 146 on the surface of at least one of them, that is, on the surface of the silicon substrate 132; and implementing etching by TMAH or the like through the mask 146 in such a way that the portion of the silicon substrate 132 not covered with the mask 146 is first etched to expose the mask 128, after which only the portion of the active layer 116 not covered with the mask 128 is etched. |
