发明名称 |
Susceptor shaft vacuum pumping |
摘要 |
Provided herein is a method of improving the planarity of a support plate of a susceptor for use during deposition of a film of material onto a substrate comprising the steps of reducing pressure in a hollow core of a shaft to a level below atmospheric pressure; and reducing a pressure in the deposition chamber to a level required for the deposition of the film of material onto the substrate, where the pressure in the hollow core of the shaft acts upon a lower surface of the support plate connected to the shaft and interfacing with the hollow core of the shaft and the pressure in the deposition chamber acts upon an upper surface of the support plate adapted to support the substrate thereby improving planarity. Also provided are a susceptor and a method of depositing a film onto a substrate affixed to the susceptor of the present invention. |
申请公布号 |
US2003026904(A1) |
申请公布日期 |
2003.02.06 |
申请号 |
US20010922352 |
申请日期 |
2001.08.03 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
YADAV SANJAY;SHANG QUANYUAN;KELLER ERNST;CHANG WEI |
分类号 |
C23C16/458;H01L21/205;H01L21/683;(IPC1-7):C23C16/00 |
主分类号 |
C23C16/458 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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