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摘要
申请公布号
JP3368335(B2)
申请公布日期
2003.01.20
申请号
JP20000216689
申请日期
2000.07.17
申请人
发明人
分类号
C23C10/28;C23C14/58;C23C28/02;(IPC1-7):C23C28/02
主分类号
C23C10/28
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