| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a laser beam resonator having high reproducibility and yields by forming a separation groove where flatness on a section is excellent on an AlGaInN-based crystal substrate. SOLUTION: In an AlGaInN-based laser wafer manufactured on a sapphire substrate, the substrate is irradiated with a pulse laser beam from the back side, and then is applied to an AlGaInN-based crystal section other than the laser resonator section of a surface for forming a separation groove. After that, force is applied along the separation groove for separating the substrate to a laser bar. In this manner, the surface of the resonator where flatness is extremely high and a reflection loss rarely exists is achieved, thus achieving manufacture with high reproducibility and yields. |
