LOAD LOCK CHAMBER OF SEMICONDUCTOR FABRICATION EQUIPMENT

摘要

PURPOSE: A load lock chamber of semiconductor fabrication equipment is provided to minimize shock or vibration of a wafer cassette in a loading/unloading process of the wafer cassette. CONSTITUTION: An elevator portion(220) and a loading/unloading portion(130) are installed in a stage(110) of a load lock chamber(100). The elevator portion(220) has a shaft(122) and a base(124). The base(124) is horizontally installed on an upper end portion of the shaft(122). The loading/unloading portion(130) has the first pivot plate(132a), the second pivot plate(132b), and a pivot motor. A wafer cassette(140) is inserted into the stage(110) and loaded into the elevator portion(220) by rotation of the loading/unloading portion(130). A buffering member(150) is installed at the loading/unloading portion(130) in order to buffer a shock of the wafer cassette(140).