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发明名称
TEMPERATURE CONTROLLING METHOD AND APPARATUS FOR A PLASMA PROCESSING CHAMBER
摘要
申请公布号
EP0910686(B1)
申请公布日期
2003.01.08
申请号
EP19970925746
申请日期
1997.06.02
申请人
LAM RESEARCH CORPORATION
发明人
WICKER, THOMAS, E.;COOK, JOEL, M.;MARASCHIN, ROBERT, A.;KENNEDY, WILLIAM, S.;BENJAMIN, NEIL
分类号
C23C16/44;C23C16/455;C23C16/50;C23C16/505;C23C16/507;H01J37/32;H01L21/205;H01L21/302;(IPC1-7):C23C16/50
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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