| 摘要 |
PURPOSE: A vacuum chuck is provided to prevent a substrate from being contaminated by fabricating the vacuum chuck while using a mesh plate, and to apply the same pressure on the entire surface of the vacuum chuck by maintaining a uniform size of the mesh plate in accordance with a desired specification. CONSTITUTION: A plurality of mesh plates of each uniform size are stacked, heated and compressed to form the vacuum chuck. The size of the mesh plate is not changed even after the heating process and compression process are performed. The material of the mesh plate is either one of SUS304, steel or polyestere.
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