LIGHTING SYSTEM WITH A PLURALITY OF INDIVIDUAL GRIDS

摘要

The invention relates to a lighting system for wavelengths of 100 nm having an object plane and a field plane. Said invention is characterized in that the lighting system comprises at least one grid element having a plurality of individual grids, a grid period being assigned to the individual grid, and at least one physical diaphragm in a diaphragm plane, which is connected downstream of the grid element in the optical path from the object plane to the image plane.