METHOD AND APPARATUS FOR INSPECTING FILM QUALITY INSPECTING METHOD AND FILM QUALITY INSPECTING APPARATUS

摘要

PURPOSE: A method and apparatus for inspecting film quality are provided to quickly and simply inspect the crystalline status of a silicon substrate. CONSTITUTION: A film quality inspecting method includes steps of applying a measuring beam with a specific wavelength to an annealed silicon film formed on a substrate in a direction inclined with respect to the silicon film, measuring a reflection intensity or reflectivity of a reflection beam reflected by the silicon film as a result of the application, and inspecting a film quality of the silicon film based on the result value obtained by the measurement.