| 摘要 |
PROBLEM TO BE SOLVED: To provide an acceleration sensor capable of easily absorbing the offset of a sensor output and its fluctuation according to the operating environment. SOLUTION: A first moving part 11 having a specific displacement direction is floatably supported to a substrate 10. A second moving part 12 having the displacement direction is supported to the first moving part 11. The displacement to the displacement direction against the substrate 10 of the first moving part 11 is detected as a variation of capacitance between displacement detecting fixed electrodes 14a, 14b and a displacement detecting movable electrode 16. To a servo electrode 13, a servo voltage is supplied so as to cause electrostatic attraction suppressing the displacement based on the detected displacement of the first moving part 11. The displacement of the second moving part 12 in the direction against the substrate 10 is detected as the variation of the capacitance between acceleration detecting fixed electrodes 15a, 15b and an acceleration detecting movable electrode 18. Based on the detected displacement of the second moving part 12, the added acceleration is detected. |
