| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized and highly sensitive pressure detector capable of accurately detecting external pressure. SOLUTION: In this package for the pressure detector, a semiconductor element 3 is mounted on one principal surface of an insulating substrate 1 while a first electrode 7 for capacitance formation is provided on the other principal surface thereof, and an insulating plate 2 having, on its inside principal surface, a second electrode 8 confronting the first electrode 7 is joined in a flexible state to the insulating substrate 1 so as to form a closed space bordering the other principal surface of the insulating substrate 1. The first and second electrodes 7 and 8 are laid over central parts of areas exposed to the closed space of the other principal surface of the insulating substrate 1 and of the inside principal surface of the insulating plate 2, respectively, and formed into substantially circular shapes having 50 to 80% diameters relative to the diameters of the areas.
|
