| 摘要 |
PURPOSE: An apparatus for driving a cover of a substrate cleaning bath is provided to remove an unnecessary installation space of an air pressure cylinder and reduce a fabricating cost by opening or shutting a couple of covers by the air pressure cylinder. CONSTITUTION: A plurality of covers(2a,2b) are formed on an upper portion of a cleaning bath. The covers(2a,2b) are fixed by a couple of cover shafts(3a,3b). The cover shafts(3a,3b) are supported by a bracket(10) of a side portion of the cleaning bath. The cover shafts(3a,3b) are extended to an upper and a lower direction by a couple of arms(4a,4b). An air pressure cylinder(7) is used for rotating the cover shafts(3a,3b). The air pressure cylinder(7) is supported by a side portion of the cleaning bath through a pin(9). A piston rod(8) is connected with the arm(4b) through a pin(6b). The cover shafts(3a,3b) are rotated to opposite directions, respectively by an operation of the piston rod(8). A stroke of the piston rod(8) of the air pressure cylinder(7) is set up to rotate the cover shafts(3a,3b) as much as 80 degrees.
|
