ELECTRONIC CIRCUIT DEVICE INSPECTION APPARATUS AND INSPECTING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an inspection apparatus of electronic circuit devices exhibiting a high reliability into which a connection inspection terminal which has a simple form and can make contact with terminals of an electronic circuit device without an excessive pressure is integrated, and to provide a method of inspection of electronic circuit devices using the apparatus. SOLUTION: The connection inspection terminal 3 which is actively driven by physical stimulation is used as a connection inspection terminal 3 of the electronic circuit device inspection apparatus 1.