发明名称 |
Semiconductor manufacturing facility and a semiconductor manufacturing method |
摘要 |
A semiconductor manufacturing facility has a proper strength and an anti-vibration effect. The semiconductor facility contains processing apparatuses, installation tables and an installation floor. An apparatus having a vibration source is installed on an installation table having a rigid structure. The installation table is installed on the installation floor having a floor construction including a plurality of columns, which support a floor member extending in horizontal directions. An interval of the columns is 4 m to 12 m.
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申请公布号 |
US2002155731(A1) |
申请公布日期 |
2002.10.24 |
申请号 |
US20020103135 |
申请日期 |
2002.03.22 |
申请人 |
SUENAGA OSAMU;YAMAMOTO KAZUO;FUJIHARA KAORU;KOBAYASHI SADAO |
发明人 |
SUENAGA OSAMU;YAMAMOTO KAZUO;FUJIHARA KAORU;KOBAYASHI SADAO |
分类号 |
E04B5/43;F16F15/02;G03F7/20;H01L21/00;H01L21/027;(IPC1-7):H01L21/26 |
主分类号 |
E04B5/43 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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