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发明名称
METHOD AND DEVICE FOR DRYING SUBSTRATE
摘要
申请公布号
EP1158257(A4)
申请公布日期
2002.10.23
申请号
EP19990935126
申请日期
1999.08.10
申请人
TOHO KASEI LTD.;DAIKIN INDUSTRIES, LTD.
发明人
MAEDA, NORIO;SUMI, KOJI;AIHARA, HIROSHI;OONO, MASAO;IZUTANI, NAOAKI
分类号
H01L21/304;B05B7/04;B08B3/04;H01L21/00;(IPC1-7):F26B21/00
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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