APPARATUS FOR ATTACHING SANDPAPER

摘要

PURPOSE: An apparatus for attaching sandpaper is provided to prevent particles from being accumulated on the sandpaper and to prevent air bubbles between the sandpaper and a dummy wafer, by semiautomatically attaching the sandpaper to the dummy wafer. CONSTITUTION: A stage(110) has a loading surface(114) on which the dummy wafer is placed. A press member(130) gradually attaches a material from a side of the dummy wafer placed on the loading surface. The material to be attached is placed in a position separated from the loading surface by a supporting unit(150).