INTEGRATED SILICON CONTACTOR AND APPARATUS AND METHOD FOR FABRICATING THE SAME

摘要

PURPOSE: An integrated silicon contactor and an apparatus and a method for fabricating the same are provided to contact a lead terminal of a semiconductor device with a contact pad of a socket board by forming a conductive silicon portion only on the lead terminal of a semiconductor device and an insulating portion on the remaining region. CONSTITUTION: A conductive silicon portion(12) is contacted with a ball lead(22) of a BGA(Ball Grid Array) semiconductor device(20). An insulating silicon portion(14) is used as an insulating material between the conductive silicon portion(12) and the conductive silicon portion(12). A silicon contactor(10) is mounted on a socket board(24). The conductive silicon portion(12) is contacted with a contact pad(26) of the socket board(24) in order to connect electrically the ball lead(22) of the semiconductor device with the contact pad(26) of the socket board(24). A lower portion(16) of the conductive silicon portion(12) is projected as much as h. The h is about 20 to 50 micro meter.