EVALUATION DEVICE OF ELECTRON BEAM FOCUS PERFORMANCE AND ELECTRON BEAM ALIGNER

摘要

PROBLEM TO BE SOLVED: To provide an evaluation device of electron beam focus performance in which the evaluation of high focus performance can be performed intermittently and the maintenance of a sensor can be facilitated. SOLUTION: A ceramics knife edge securing base 24 is provided on the side or at a part of a wafer stage 16. A knife edge-like reference mark 1 is put on the upper surface of the knife edge securing base 24. A photodiode securing metal 28 is provided below the knife edge securing base 24. The photodiode securing metal 28 is provided with an ultrasonic motor or the like not shown in Fig. Such that it can rotate about the Y axis. Four photodiodes 26 are arranged on the upper/lower and left/right outer circumferential surface of the photodiode securing metal 28. Each photodiode 26 is connected to a section 30 for measuring blur of the beam.