METHOD AND INSTRUMENT FOR OPTICALLY MEASURING CONSTANT OF OPTICAL PROPERTY OF DIELECTRIC SUBSTANCE, AND MANUFACTURING SYSTEM INCORPORATING THE DEVICE

摘要

An optical measuring method characterized by comprising the steps of obtaining spectroscopic spectrum data on the amplitude and phase by Fourier-transforming the time waveform of the field intensity of a reflected or transmitted electromagnetic wave from a dielectric substance by THz-TDS determining the phase shift by the dielectric substance for each frequency by comparing the spectroscopic spectrum data obtained on the amplitude and phase with the spectroscopic spectrum data of when the dielectric substance is not placed, and acquiring the dispersion curve of a coupled wave of the wave motion of a pulse electromagnetic wave incident on the dielectric substance and the wave motion of the polarized field in the dielectric substance by determining the wave number of the coupled wave for each frequency from the phase shift.