METAL MASK ETCHING OF SILICON,申请号EP20000988213-传众专利搜索

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发明名称	METAL MASK ETCHING OF SILICON
摘要
申请公布号	EP1240665(A1)	申请公布日期	2002.09.18
申请号	EP20000988213	申请日期	2000.12.20
申请人	APPLIED MATERIALS, INC.	发明人	KUMAR, AJAY;KHAN, ANISUL;LIU, WEI;CHAO, JOHN;CHINN, JEFF
分类号	H01L21/3065;H01L21/308;H01L21/76;H01L21/8242;H01L27/108;(IPC1-7):H01L21/308	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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