发明名称 Crystal puller and method for growing single crystal semiconductor material
摘要 A crystal puller and method for growing single crystal semiconductor material having a susceptor assembly that includes a susceptor disposed in the crystal puller for receiving and holding a crucible. The side wall of the susceptor is in generally radially opposed relationship with the side wall of the crucible. A sealing member of the assembly is adapted for close contact relationship with the crucible side wall and the susceptor side wall to generally seal between the crucible and the susceptor any gaseous product resulting from a reaction of the crucible with the susceptor against escape from between the crucible and the susceptor, thereby inhibiting the reaction of the crucible with the susceptor.
申请公布号 US2002124792(A1) 申请公布日期 2002.09.12
申请号 US20010757121 申请日期 2001.01.09
申请人 SREEDHARAMURTHY HARIPRASAD;BANAN MOHSEN;HOLDER JOHN;FERRY LEE 发明人 SREEDHARAMURTHY HARIPRASAD;BANAN MOHSEN;HOLDER JOHN;FERRY LEE
分类号 C30B15/10;C30B29/06;(IPC1-7):C30B15/00;C30B21/06;C30B27/02;C30B28/10;C30B30/04;C30B35/00 主分类号 C30B15/10
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