发明名称 |
Crystal puller and method for growing single crystal semiconductor material |
摘要 |
A crystal puller and method for growing single crystal semiconductor material having a susceptor assembly that includes a susceptor disposed in the crystal puller for receiving and holding a crucible. The side wall of the susceptor is in generally radially opposed relationship with the side wall of the crucible. A sealing member of the assembly is adapted for close contact relationship with the crucible side wall and the susceptor side wall to generally seal between the crucible and the susceptor any gaseous product resulting from a reaction of the crucible with the susceptor against escape from between the crucible and the susceptor, thereby inhibiting the reaction of the crucible with the susceptor.
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申请公布号 |
US2002124792(A1) |
申请公布日期 |
2002.09.12 |
申请号 |
US20010757121 |
申请日期 |
2001.01.09 |
申请人 |
SREEDHARAMURTHY HARIPRASAD;BANAN MOHSEN;HOLDER JOHN;FERRY LEE |
发明人 |
SREEDHARAMURTHY HARIPRASAD;BANAN MOHSEN;HOLDER JOHN;FERRY LEE |
分类号 |
C30B15/10;C30B29/06;(IPC1-7):C30B15/00;C30B21/06;C30B27/02;C30B28/10;C30B30/04;C30B35/00 |
主分类号 |
C30B15/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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