Drehratensensor

摘要

The invention relates to a rotational speed sensor comprising a Coriolis element (100) which is arranged on the surface (1) of a substrate. The Coriolis element (100) is excited in order to vibrate parallel to a first axis (X). The Coriolis element (100) is deflected on a second axis (Y) which is perpendicular to the first axis (X) by virtue of Coriolis force. A detection element (140) is provided for detecting said deflection.