发明名称 Kontaktanordnung mit einer dielektrischen Fuse für ein IC-Speicherelement und Verfahren zur Herstellung einer solchen Kontaktanordnung
摘要 The invention relates to a contact system comprising a dielectric fuse (4) for an IC-memory component, and a method for producing one such contact system. Said contact system comprises a metallisation region (2, 3) which is arranged on a substrate (1) and is surrounded by an isolation layer (17). An isolation layer (4) used as a dielectric fuse is arranged on said metallisation region (2, 3). A metallisation layer is then applied to the dielectric fuse, said metallisation layer being used as a bit line (5) of the IC-memory component and being preferably produced according to RIE technology. As the dielectric fuse (4) is arranged directly below the bit line (5), it is protected from damage which may occur during later steps in the process, especially when applying a top contact (9) to the bit line (5).
申请公布号 DE10107664(A1) 申请公布日期 2002.09.05
申请号 DE20011007664 申请日期 2001.02.19
申请人 INFINEON TECHNOLOGIES AG 发明人 TOEBBEN, DIRK
分类号 G11C29/00;(IPC1-7):H01L23/525;G11C17/14;H01L27/10 主分类号 G11C29/00
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