Method for fabricating a semiconducting nitride film, susceptor tray, and apparatus for fabricating a semiconducting nitride film

摘要

In fabricating a semiconducting nitride film by a MOCVD method, a susceptor tray is employed. The susceptor tray is constructed of a base plate and an outer member detachable for the base plate. A substrate for the film to be formed is set in the recessed portion formed by disposing the outer member on the base plate.