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摘要
申请公布号
DE2120787(A1)
申请公布日期
1972.11.16
申请号
DE19712120787
申请日期
1971.04.28
申请人
发明人
分类号
H01L21/00;H01L23/29;H01L23/482
主分类号
H01L21/00
代理机构
代理人
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地址
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