发明名称 Verfahren zur Herstellung von mit Rippen versehener Diamant-Wärmesenke
摘要 A process for the production of a heat sink comprising a diamond substrate and fins of diamond projecting therefrom for improving heat dissipation, the fins being spaced apart to define open channels therebetween, which process comprises the steps of: (a) cutting a diamond plate prepared by gaseous phase synthesis to obtain diamond base materials; (b) placing the diamond base materials on a supporting member designed in such a manner that gaps are provided for inserting fins, wherein the highest part of the fins to be inserted and the surface of the diamond divided base materials is substantially the same in height, and inserting the fins in the gaps; and (c) growing diamond on the diamond divided base materials and fins and obtaining the said diamond heat sink without removing the diamond divided base materials. <IMAGE>
申请公布号 DE69430024(T2) 申请公布日期 2002.08.22
申请号 DE1994630024T 申请日期 1994.06.14
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 YAMAMOTO, YOSHIYUKI;TSUNO, TAKASHI;IMAI, TAKAHIRO;FUJIMORI, NAOJI
分类号 H01L21/48;H01L23/367;H01L23/373;(IPC1-7):H01L23/373 主分类号 H01L21/48
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