| 发明名称 |
Out-of-plane micro-device structures |
| 摘要 |
<p>Several methods and structures for improving the yield of out-of-plane micro-device structures including springs and coils (18) are described. In one method the springs (18) used to form out-of-plane structures are constrained via a tether (14) to avoid bunching and entanglement. The high yield structure may be used in numerous electronic applications such as filter circuits. <IMAGE></p> |
| 申请公布号 |
EP1231616(A1) |
申请公布日期 |
2002.08.14 |
| 申请号 |
EP20020250722 |
申请日期 |
2002.02.01 |
| 申请人 |
XEROX CORPORATION |
发明人 |
FORK, DAVID K.;MEI, PING;VAN SCHUYLENBERGH, KOENRAAD F. |
| 分类号 |
G03F7/20;H01F41/04;B81B1/00;B81B3/00;B81C1/00;B81C3/00;H01F17/00;H01F17/02;H01F27/00;H01L21/48;H01L21/60;H01L23/00;H01L23/522;H01L27/08;H05K3/40;(IPC1-7):H01F41/04;H01L21/02 |
主分类号 |
G03F7/20 |
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