| 摘要 |
PROBLEM TO BE SOLVED: To provide an electric-capacitive vacuum gauge which comprises a silicon diaphragm of high corrosion-resistance while a long-period stability is assured. SOLUTION: A gas contacting part of a silicon substrate 1 where a silicon diaphragm 2 is formed is covered with any one of aluminum oxide, zirconium oxide, and titanium oxide, as a protecting film against a corrosive gas.
|
